Application
﹤100> Silicon wafer may be used as a substrate for the epitaxial growth of SiC, and TiN thin films.
Packaging
1 set in padded box
1EA refers to 1 wafer and 5EA refers to 5 wafers
5 ea in rigid mailer
Physical properties
Oxygen content: ﹤= 1~1.8 x 1018 /cm3; Carbon content: ﹤= 5 x 1016 /cm3; Boule diameter: 1~8 ″
0 vortex defects. Etch pitch density (EPD) ﹤ 100 (cm-2). Resistivity 10-3 - 40 Ω cm
This product has met the following criteria to qualify for the following awards: